Nanofabrication 2009
Book:
Stephen
A. Campbell
Fabrication Engineering at the Micro- And Nanoscale (
Course Schedule (click on the
title to download lecture notes in pdf)
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Lektor |
Date |
Room
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Title |
Pages in the book |
Exercises |
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Lecture 1 |
KP |
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Diffusion |
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Lecture 2 |
KP |
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Termisk oxidering |
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Lecture 3 |
KP |
|
Tykkelsesmåling
(ellipsometri), Ion implantering |
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Lecture 4 |
KP |
|
Laboratorieøvelse:
Oxidering+tykkelsesmåling |
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Lecture 5 |
LG |
15/10/2008 12:30
|
5.227 |
|
7.4, 7.8 |
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Lecture 6 |
LG |
22/10/2007 12:30
|
4.204 |
|
8.1, 8.15 |
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Lecture 7 |
LG |
29/10/2007 12:30
|
5.034 |
|
|
|
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Lecture 8 |
LG |
06/11/2007 12:30
|
5.227 |
Laboratorieøvelse: UV
litografi |
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Lecture 9 |
KP |
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Processer i vakuum, plasmaer |
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Lecture 10 |
KP |
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Tynde film, PVD |
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Lecture 11 |
KP |
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Tynde film, CVD |
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Lecture 12 |
KP |
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Laboratorieøvelse: Tynde film |
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Lecture 13 |
KP |
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Epitaxiel vækst |
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Lecture 14 |
KP |
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E-beam litografi |
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Lecture 15 |
KP |
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MEMS |
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Information on the course:
Mail me: lg@nano.aau.dk